00000nam 2200000zi 4500 9.882988 CaOODSP 20221107170438 m o d f cr |n||||||||| 191218s1973 oncda|| ob f00| 0|eng d CaOODSP eng rda CaOODSP n-cn--- Co24-552/1973E-PDF Clarke, R. A., author. Research contract on thin dielectric films / prepared by R.A. Clarke, M.A. Hopper and L. Young. [Ottawa] : [Communications Research Centre, Department of Communications], [1973] 1 online resource (1 volume (various pagings)) : charts, illustrations text txt rdacontent computer c rdamedia online resource cr rdacarrier Digitized edition from print [produced by Innovation, Science and Economic Development Canada]. "Report [(3)] to Communications Research Centre, Ottawa, Ontario." "File Number 01GR36001-1-0520." "Serial Number 0GR1-0218." "From September 30, 1972 to May 1, 1973." Includes bibliographical references. Dielectric films. Thin films. Silicon oxide films. Couches diélectriques. Couches minces. Couches minces de silice. Canada. Department of Communications, issuing body. University of British Columbia. Dept. of Electrical Engineering, issuing body. PDF 1.79 MB https://publications.gc.ca/collections/collection_2020/isde-ised/Co24/Co24-552-1973-eng.pdf