00000nam 2200000zi 4500 9.880456 CaOODSP 20240220154251 m o d f cr cn||||||||| 191009t20112011nsca o f000 0 eng d CaOODSP eng rda CaOODSP eng eng fre D68-3/069-2011E-PDF El-Gamal, Mourad, author. MEMS in aircraft engine monitoring : a humidity sensor / Mourad El-Gamal, MEMS Vision International Inc. Dartmouth, Nova Scotia : Defence R&D Canada - Atlantic, 2011. ©2011 1 online resource (vi, 10 pages, 2 unnumbered pages) : illustrations (some colour). text txt rdacontent computer c rdamedia online resource cr rdacarrier Contract report ; DRDC Atlantic CR 2011-069 "Prepared by: MEMS Vision International Inc." "PWGSC contract number: W7707-756865." "July 2011." "In order to fully understand and exploit MEMS technologies for engine condition monitoring applications, issues impeding the implementation of MEMS sensors on aircraft engines need to be addressed. This effort introduces the first step in such implementation process. It develops, characterizes and demonstrates the deployment of a MEMS-based humidity sensor in anticipation of further development of engine condition monitoring sensors (e.g. NOx that monitor the level of pollution). Two capacitive-type MEMS sensor prototypes were designed, developed and built. The results demonstrated a linear response to changes between 11% and 97% of relative humidity"--Abstract, page i. Includes abstracts in English and French. Defence R&D Canada. Defence R&D Canada - Atlantic. MEMS Vision International Inc. Contract report (Defence R&D Canada) DRDC Atlantic CR 2011-069. (CaOODSP)9.802312 PDF 2.32 MB https://publications.gc.ca/collections/collection_2019/rddc-drdc/D68-3-069-2011-eng.pdf