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| 01703cam 2200409zi 4500 |
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| 001 | 9.882988 |
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| 003 | CaOODSP |
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| 005 | 20221107170438 |
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| 006 | m o d f |
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| 007 | cr |n||||||||| |
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| 008 | 191218s1973 oncda|| ob f00| 0|eng d |
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| 040 | |aCaOODSP|beng|erda|cCaOODSP |
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| 043 | |an-cn--- |
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| 086 | 1 |aCo24-552/1973E-PDF |
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| 100 | 1 |aClarke, R. A., |eauthor. |
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| 245 | 10|aResearch contract on thin dielectric films / |cprepared by R.A. Clarke, M.A. Hopper and L. Young. |
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| 264 | 1|a[Ottawa] : |b[Communications Research Centre, Department of Communications], |c[1973] |
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| 300 | |a1 online resource (1 volume (various pagings)) : |bcharts, illustrations |
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| 336 | |atext|btxt|2rdacontent |
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| 337 | |acomputer|bc|2rdamedia |
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| 338 | |aonline resource|bcr|2rdacarrier |
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| 500 | |aDigitized edition from print [produced by Innovation, Science and Economic Development Canada]. |
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| 500 | |a"Report [(3)] to Communications Research Centre, Ottawa, Ontario." |
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| 500 | |a"File Number 01GR36001-1-0520." |
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| 500 | |a"Serial Number 0GR1-0218." |
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| 500 | |a"From September 30, 1972 to May 1, 1973." |
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| 504 | |aIncludes bibliographical references. |
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| 650 | 0|aDielectric films. |
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| 650 | 0|aThin films. |
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| 650 | 0|aSilicon oxide films. |
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| 650 | 6|aCouches diélectriques. |
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| 650 | 6|aCouches minces. |
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| 650 | 6|aCouches minces de silice. |
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| 710 | 1 |aCanada. |bDepartment of Communications, |eissuing body. |
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| 710 | 2 |aUniversity of British Columbia. |bDept. of Electrical Engineering, |eissuing body. |
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| 856 | 40|qPDF|s1.79 MB|uhttps://publications.gc.ca/collections/collection_2020/isde-ised/Co24/Co24-552-1973-eng.pdf |
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