| 000 | 00000nam 2200000zi 4500 |
| 001 | 9.887461 |
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| 003 | CaOODSP |
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| 005 | 20221107171717 |
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| 006 | m o d f |
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| 007 | cr |n||||||||| |
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| 008 | 200514e19970922onc ob f000 0|eng d |
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| 040 | |aCaOODSP|beng|erda|cCaOODSP |
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| 043 | |an-cn--- |
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| 086 | 1 |aIu64-94/1997E-PDF |
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| 245 | 00|aMicroelectronic research infrastructure. |
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| 264 | 1|a[Ottawa] : |bIndustry Canada, |cSeptember 22, 1997. |
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| 300 | |a1 online resource (40 pages) |
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| 336 | |atext|btxt|2rdacontent |
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| 337 | |acomputer|bc|2rdamedia |
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| 338 | |aonline resource|bcr|2rdacarrier |
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| 500 | |aDigitized edition from print [produced by Innovation, Science and Economic Development Canada]. |
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| 500 | |aIssued also in French under title: Activités de recherche sur les semiconducteurs. |
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| 504 | |aIncludes bibliographical references. |
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| 650 | 0|aMicroelectronics|xResearch|zCanada. |
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| 710 | 1 |aCanada. |bIndustry Canada, |eissuing body. |
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| 775 | 08|tActivités de recherche sur les semiconducteurs.|w(CaOODSP)9.904438 |
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| 856 | 40|qPDF|s1.11 MB|uhttps://publications.gc.ca/collections/collection_2021/isde-ised/iu64/Iu64-94-1997-eng.pdf |
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