Research contract on thin dielectric films / prepared by R.A. Clarke, M.A. Hopper and L. Young.: Co24-552/1973E-PDF
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Department/Agency | Canada. Department of Communications, issuing body. University of British Columbia. Dept. of Electrical Engineering, issuing body. |
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Title | Research contract on thin dielectric films / prepared by R.A. Clarke, M.A. Hopper and L. Young. |
Publication type | Monograph |
Language | [English] |
Format | Electronic |
Electronic document | |
Note(s) | Digitized edition from print [produced by Innovation, Science and Economic Development Canada]. "Report [(3)] to Communications Research Centre, Ottawa, Ontario." "File Number 01GR36001-1-0520." "Serial Number 0GR1-0218." "From September 30, 1972 to May 1, 1973." Includes bibliographical references. |
Publishing information | [Ottawa] : [Communications Research Centre, Department of Communications], [1973] |
Author / Contributor | Clarke, R. A., author. |
Description | 1 online resource (1 volume (various pagings)) : charts, illustrations |
Catalogue number |
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Subject terms | Dielectric films. Thin films. Silicon oxide films. Couches diélectriques. Couches minces. Couches minces de silice. |
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