Research contract on thin dielectric films / prepared by R.A. Clarke, M.A. Hopper and L. Young.: Co24-552/1973E-PDF

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publications.gc.ca/pub?id=9.882988&sl=0

Publication information
Department/Agency Canada. Department of Communications, issuing body.
University of British Columbia. Dept. of Electrical Engineering, issuing body.
Title Research contract on thin dielectric films / prepared by R.A. Clarke, M.A. Hopper and L. Young.
Publication type Monograph
Language [English]
Format Electronic
Electronic document
Note(s) Digitized edition from print [produced by Innovation, Science and Economic Development Canada].
"Report [(3)] to Communications Research Centre, Ottawa, Ontario."
"File Number 01GR36001-1-0520."
"Serial Number 0GR1-0218."
"From September 30, 1972 to May 1, 1973."
Includes bibliographical references.
Publishing information [Ottawa] : [Communications Research Centre, Department of Communications], [1973]
Author / Contributor Clarke, R. A., author.
Description 1 online resource (1 volume (various pagings)) : charts, illustrations
Catalogue number
  • Co24-552/1973E-PDF
Subject terms Dielectric films.
Thin films.
Silicon oxide films.
Couches diélectriques.
Couches minces.
Couches minces de silice.
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