MEMS in aircraft engine monitoring : a humidity sensor / Mourad El-Gamal, MEMS Vision International Inc. : D68-3/069-2011E-PDF

"In order to fully understand and exploit MEMS technologies for engine condition monitoring applications, issues impeding the implementation of MEMS sensors on aircraft engines need to be addressed. This effort introduces the first step in such implementation process. It develops, characterizes and demonstrates the deployment of a MEMS-based humidity sensor in anticipation of further development of engine condition monitoring sensors (e.g. NOx that monitor the level of pollution). Two capacitive-type MEMS sensor prototypes were designed, developed and built. The results demonstrated a linear response to changes between 11% and 97% of relative humidity"--Abstract, page i.

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